Suspended highly 3D interdigitated carbon microelectrodes

3D interdigitated pyrolytic carbon microelectrodes (3D IDE) with high complexity and interconnectivity were fabricated taking advantage of suspended microstructures. A novel fabrication method for a polymer precursor template was developed based on dual photoresist process including multiple UV exposures at two different wavelengths. The structures subsequently pyrolyzed 1100°C 1 h in N2 environment to obtain microelectrodes. Different electrode designs the electrochemical performance evaluated by cyclic voltammetry impedance spectroscopy (EIS). IDE smaller structural dimensions displayed ultra-microelectrode (UME)-like behavior sigmoidal shape voltammograms (CV) absence linear diffusion regime EIS. Furthermore, 2-fold higher peak currents CV significantly reduced charge transfer resistance compared 2D IDE.